AMC Filter

Airborne molecular contamination is a special challenge of semiconductor manufacturing in small dimensions and it can lead to undesired chemical reactions on the wafer surface and in process equipment.

 

As one of the leading manufacturers of air-cleaning equipment, M+W Products offers a variety of products and services in the field of AMC control. Different filter media elements, ranging from activated carbon material to highly efficient fibrous-ion exchange material especially developed for the semiconductor industry, are used to remove gaseous contaminants. M+W Products has an outstanding position worldwide in this field. Our unique fibrous ion-exchange material removes acidic as well as basic contaminants. All filters can be produced for make-up and recirculation air systems (v-cell shape) and also as tool-and-process protection filters (flat shape).

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