Environmental Chambers

Our precision air-conditioning chambers have been developed to keep a constant air temperature, air humidity and air differential pressure. The process air is filtered with ULPA filters to ensure a tight cleanroom class. This series features outstanding temperature- and humidity-control qualities.


An accurate climate ensures high quality, reliable measurements. Because of limited footprint and airflow requirements, we have developed customized climate control solutions – Environmental Chambers -- in close cooperation with our customers.


Due to the extreme requirements, environmental influences on the measurements must be reduced to a minimum.


Optical methods are used to measure substrates to ensure the quality of wafers and masks during the manufacturing process. The measuring system is required to have 10x better resolution than the respective processing devices. Currently,
the optical measuring devices achieve a reproducible measurement accuracy
of < 1 nm.

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