Precision Air Handling Units

Surface processing for the semiconductor industry, nanotechnology and the production of optical-storage media requires a consistent development environment. The right climate ensures quality and reduces the rejection rate in production.


Decisive parameters are:

  • The highly precise stabilization of temperature and humidity
  • The assurance of air purity
  • The exclusion of sound and vibration influences


Our systems and applications meet the individual requirements of our customers in every regard and ensure that they have decisive advantages in research and development as well as in process and product quality.


Whether you need a total package or individual services, we offer customized solutions for all kinds of process steps. With these solutions and services, we maintain and precisely control physical parameters such as air temperature, humidity, and chemical contamination in process air.

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